(Trimethyl)methylcyclopentadienylplatinum(IV)
CAS 94442-22-5
(MeCp)PtMe₃ is the industry-standard platinum ALD/CVD precursor — the volatile source behind platinum thin films in semiconductor devices, MEMS electrodes and focused-ion/electron-beam induced deposition.
Typical specification
| Molecular formula | (CH₃C₅H₄)Pt(CH₃)₃ |
|---|---|
| Molecular weight | 319.30 |
| Assay | ≥ 99%; electronic grade ≥ 99.99% (metals basis) |
| Platinum content | 60.9% |
| Melting point | ~30 °C |
| Vapor pressure | ~0.05 Torr at 23 °C |
| Trace metals (electronic grade) | ICP-MS certificate per lot |
| HS code (export) | 2843900039 |
Lot-specific COA issued with every shipment. SDS and ICP elemental impurity data available on request.
Where (MeCp)PtMe₃ is used
Atomic layer deposition of platinum
The reference precursor for Pt ALD with oxygen or ozone co-reactant, delivering conformal films for electrodes, catalysis-on-chip and semiconductor metallization at wafer scale.
FIB/FEBID nano-deposition
The standard organometallic charge in focused ion- and electron-beam deposition systems for circuit edit, TEM lamella protection and nanofabrication.
Storage and shipping
Storage. Store cold (2–8 °C) protected from light in sealed ampoules; volatile low-melting solid.
Shipping. Ships in sealed ampoules with cold packs in warm seasons; electronic-grade lots include full trace-metal certification.
Packaging. 1 g · 5 g · 10 g · 25 g ampoules; bubbler fills on request
Synonyms
- Trimethyl(methylcyclopentadienyl)platinum
- MeCpPtMe3
- Platinum ALD precursor
- (MeCp)Pt(CH3)3
Frequently asked questions
Do you fill customer bubblers?
Yes — ampoule-to-bubbler transfer or direct fills into customer-supplied stainless bubblers can be arranged for deposition-tool users, with certified fill weight.
How is pricing structured?
Quotes reference the day's metal fixing on assayed contained metal plus a stated conversion charge, and can be locked at order confirmation for recurring volumes.
What documentation is included?
Every lot ships with a certificate of analysis stating assayed metal content, plus an English SDS. ICP trace-metal panels are available on request.